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Proceedings Paper

Application of the technology of excimer laser etching to fabricate three-dimensional microstructures
Author(s): Jingqiu Liang; Zichun Le; Jingshong Yao; Yushu Zhang; Shurong Wang; Ping Zhang; YiHui Wu; Ming Xuan; Lijun Wang
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Paper Abstract

In the present paper, the authors report their research on fabricating the three-dimensional microstructures on polymers by using the technology of excimer laser direct etching. A kind of mask structure called adhering mask, which can be used to fulfill the direct etching of polymers by a simpler optical system, is introduced. In addition, its fabrication process and optical system of the direct etching are also given in this paper. Finally the three-dimensional microstructures we fabricate by the technology are shown.

Paper Details

Date Published: 15 January 2003
PDF: 8 pages
Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); doi: 10.1117/12.478288
Show Author Affiliations
Jingqiu Liang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Zichun Le, Zhejiang Univ. of Technology (China)
Jingshong Yao, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Yushu Zhang, Jilin Univ. (China)
Shurong Wang, National Research & Dev. Ctr. for Optoelectronics (China)
Ping Zhang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
YiHui Wu, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Ming Xuan, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Lijun Wang, Changchun Institute of Optics, Fine Mechanics and Physics (China)


Published in SPIE Proceedings Vol. 4979:
Micromachining and Microfabrication Process Technology VIII
John A. Yasaitis; Mary Ann Perez-Maher; Jean Michel Karam, Editor(s)

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