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Proceedings Paper

Inverse model for optimizing the process of fabricating a microstructure by laser chemical vapor deposition
Author(s): Chaoyang Zhang; Weizhong Dai; Raja Nassar; Hong Lan
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Paper Abstract

A laser-induced chemical vapor deposition (LCVD) process is capable of producing high aspect ratio microstructures of arbitrary shape and is rapid, flexible, and relatively inexpensive to operate. To achieve high resolution and accurate fabrication, predictive models must be developed for process control and optimization. In this paper, we present an inverse model for predicting and optimizing the scanning pattern of the laser beam on the surface of deposit in order to produce accurate microstructures with the desired geometry. We demonstrate the applicability of the model by simulating and optimizing the process for fabricating a microlens with a pre-specified geometry.

Paper Details

Date Published: 15 January 2003
PDF: 9 pages
Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); doi: 10.1117/12.478255
Show Author Affiliations
Chaoyang Zhang, Univ. of Vermont/Burlington (United States)
Weizhong Dai, Louisiana Tech Univ. (United States)
Raja Nassar, Louisiana Tech Univ. (United States)
Hong Lan, Louisiana Tech Univ. (United States)

Published in SPIE Proceedings Vol. 4979:
Micromachining and Microfabrication Process Technology VIII
John A. Yasaitis; Mary Ann Perez-Maher; Jean Michel Karam, Editor(s)

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