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Proceedings Paper

Process conditions and lithographic performance arch durimide polyimides in the ultra-thick film regime
Author(s): Sylvain Irenee Misat; Rudy J. M. Pellens; Rutger Voets; Angelique van Klaveren; Jean-Paul van den Heuvel; L. Peterson; Pamela J. Waterson; D. Racicot; D. Roza
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Paper Abstract

Paper pending release of an erratum.

Paper Details

Date Published: 15 January 2003
PDF: 12 pages
Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); doi: 10.1117/12.478241
Show Author Affiliations
Sylvain Irenee Misat, Arch Chemicals N.V. (Belgium)
Rudy J. M. Pellens, ASML (Netherlands)
Rutger Voets, ASML (Netherlands)
Angelique van Klaveren, ASML (Netherlands)
Jean-Paul van den Heuvel, ASML (Netherlands)
L. Peterson, Arch Chemicals Inc. (United States)
Pamela J. Waterson, Arch Chemicals Inc. (United States)
D. Racicot, Arch Chemicals Inc. (United States)
D. Roza, Arch Chemicals Inc. (United States)

Published in SPIE Proceedings Vol. 4979:
Micromachining and Microfabrication Process Technology VIII
John A. Yasaitis; Mary Ann Perez-Maher; Jean Michel Karam, Editor(s)

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