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Proceedings Paper

Reciprocating silicon microtribometer
Author(s): Philippe Dubois; Stephane von Gunten; August Enzler; Urs Lippuner; Alex Dommann; Nicolaas-F. de Rooij
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Paper Abstract

The microtribometer fabricated is designed to observe the wear of removable flat silicon test inserts, coated with thin film layers such as DLC and moving in an oscillating manner relatively to each other. For observing the low wear of DLC layers in a reasonable amount of time, high oscillating speed is essential and can be achieved by reducing the mass in motion. The silicon microtribometer reaches oscillating frequencies of 10 Hz while applying a normal force on the test inserts up to 9.6 N, the maximal displacement amplitude being 1.5 mm. The two silicon main parts of the microtribometer guide test inserts along one direction in a back and forth motion while avoiding any side friction, the actuation being done by an external linear motor. For such application crystalline silicon presents, compare to other materials, the advantage of the invariance of its behavior over time.

Paper Details

Date Published: 16 January 2003
PDF: 12 pages
Proc. SPIE 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II, (16 January 2003); doi: 10.1117/12.478200
Show Author Affiliations
Philippe Dubois, Univ. of Neuchatel (Switzerland)
Stephane von Gunten, Neu Technikum Buchs (Switzerland)
August Enzler, Neu Technikum Buchs (Switzerland)
Urs Lippuner, Neu Technikum Buchs (Switzerland)
Alex Dommann, Neu Technikum Buchs (Switzerland)
Nicolaas-F. de Rooij, Univ. of Neuchatel (Switzerland)

Published in SPIE Proceedings Vol. 4980:
Reliability, Testing, and Characterization of MEMS/MOEMS II
Rajeshuni Ramesham; Danelle M. Tanner, Editor(s)

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