Share Email Print
cover

Proceedings Paper

UV-LIGA microfabrication of a power relay based on electrostatic actuation
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A novel type of micro power relay has been designed and fabricated using UV-LIGA technology. The relay is based on electrostatic actuation and SU-8 was used as a functional material. The unique character of this novel power relay is that other than a SU-8 structure used both as an electrical insulator and a mechanical connector, all other components are made of metal or alloys. Because UV-LIGA technology has the advantages of broad material selection and the capability of making high aspect ratio microstructures, the technology is best suited for fabricating microelectromechanical power relays. A multi-step, multi-layer UV-LIGA process has been successfully developed and a prototype relay has been successfully fabricated.

Paper Details

Date Published: 16 January 2003
PDF: 9 pages
Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); doi: 10.1117/12.478171
Show Author Affiliations
Ren Yang, Louisiana State Univ. (United States)
Seok Jae Jeong, Louisiana State Univ. (United States)
Wanjun Wang, Louisiana State Univ. (United States)


Published in SPIE Proceedings Vol. 4981:
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
Siegfried W. Janson, Editor(s)

© SPIE. Terms of Use
Back to Top