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Proceedings Paper

High-throughput integration of optoelectronics devices for biochip fluorescent detection
Author(s): Evan P. Thrush; Ofer Levi; Ke Wang; James S. Harris; Stephen J. Smith
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Paper Abstract

Miniaturized, portable and robust sensing systems are required for the development of integrated biological analysis systems and their application to clinical diagnostics. This work uses vertical cavity surface emitting lasers (VCSELs), optical emission filters and PIN photodetectors to realize monolithically integrated, near infrared, fluorescence detection systems. The integration of these micro technologies with biochip applications will drastically reduce cost and allow for parallel sensing architectures, which is particularly useful for flow channel arrays such as in capillary array electrophoresis. This paper focuses on the fabrication of integrated fluorescence sensors. Fabrication procedures have been developed to realize intracavity contacted VCSELs and low noise photodetectors, such as selective AlGaAs wet etching and via planarization. A reflow process with positive photoresist has been developed to provide via electrical contacts and to optically isolate the photodetector from the light source. Three-dimensional microstructures can be simply made by this reflow technique. Optical simulations predict that a detection sensitivity lower than 10000 molecules per 104μm2 sample area. Single molecule detection may be possible in certain sensing architectures.

Paper Details

Date Published: 17 January 2003
PDF: 8 pages
Proc. SPIE 4982, Microfluidics, BioMEMS, and Medical Microsystems, (17 January 2003); doi: 10.1117/12.478145
Show Author Affiliations
Evan P. Thrush, Stanford Univ. (United States)
Ofer Levi, Stanford Univ. (United States)
Ke Wang, Stanford Univ. (United States)
James S. Harris, Stanford Univ. (United States)
Stephen J. Smith, Stanford Univ. (United States)


Published in SPIE Proceedings Vol. 4982:
Microfluidics, BioMEMS, and Medical Microsystems
Holger Becker; Peter Woias, Editor(s)

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