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Proceedings Paper

Large-scale polysilicon surface-micromachined spatial light modulator
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Paper Abstract

A large-scale, high speed, high resolution, phase-only microelectromechanical system (MEMS) spatial light modulator (SLM) has been fabricated. Using polysilicon thin film technology, the micro mirror array offers significant improvement in SLM speed in comparison to alternative modulator technologies. Pixel opto-electromechanical characterization has been quantified experimentally on large scale arrays of micro mirrors and results are reported.

Paper Details

Date Published: 20 January 2003
PDF: 7 pages
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (20 January 2003); doi: 10.1117/12.477932
Show Author Affiliations
Clara E. Dimas, Boston Micromachines Corp. (United States)
Julie Perreault, Boston Univ. (United States)
Steven Cornelissen, Boston Micromachines Corp. (United States)
Harold Dyson, Univ. of California/Berkeley (United States)
Lucent Technologies/Bell Labs. (United States)
Peter Krulevitch, Lawrence Livermore National Lab. (United States)
Paul Bierden, Boston Micromachines Corp. (United States)
Thomas Bifano, Boston Univ. (United States)

Published in SPIE Proceedings Vol. 4983:
MOEMS and Miniaturized Systems III
James H. Smith, Editor(s)

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