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Proceedings Paper

SOI/DRIE all-fiber optical switch for high-power applications
Author(s): Jing Liu; Lawrence Fan; Don L. DeVoe
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Paper Abstract

An all-fiber optical switch based on silicon on insulator (SOI) and deep reactive-ion etching (DRIE) technology has been developed. The novel switch is designed for applications requiring high optical power transfer, such as routing in optical energy conversion and transfer systems, while requiring low electrical power for switch actuation. The optical switch was realized by attaching a short optical fiber segment to a large-displacement microactuator, suspended between fixed input and output optical fibers. When the fibers are coaxially aligned, optical transfer is achieved between the fixed input and output fibers. The present work offers the potential for low electrical power operation, high-density array fabrication, fully-integrated manufacturing, and decoupled electromechanical/optical performance. The device concept and fabrication process is described, and optical transfer efficiency results are discussed. Current switches employ integrated electrothermal actuators to move the intermediate optical fiber segment, and switches based on lower-power electrostatic actuators will also be described.

Paper Details

Date Published: 21 January 2003
PDF: 10 pages
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (21 January 2003); doi: 10.1117/12.477928
Show Author Affiliations
Jing Liu, Univ. of Maryland/College Park (United States)
Lawrence Fan, Naval Surface Warfare Ctr. (United States)
Don L. DeVoe, Univ. of Maryland/College Park (United States)

Published in SPIE Proceedings Vol. 4983:
MOEMS and Miniaturized Systems III
James H. Smith, Editor(s)

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