Share Email Print
cover

Proceedings Paper

Widely tunable lasers using MEMS gratings and mirrors
Author(s): Xu Ming Zhang; J. Li; Ding Yuan Tang; Chao Lu; Ai Qun Liu
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Tunable lasers have wide applications in DWDM systems to save inventory cost and to improve the optical network functionalities. The Microelectromechanical Systems (MEMS) technology has shown strong promise to miniaturize the conventional mechanical tunable lasers with adding merits of high compactness, high speed, batch production and so on. In this paper, external cavity tunable diode lasers using MEMS movable mirrors and rotary gratings as the external reflectors are presented. One tunable laser of 2 mm × 1.5 mm is formed by integration of a surface-micromachined 3D mirror with a diode laser and an optical fiber. In addition, deep-etched structures such rotary gratings, circular mirror, microlens, and grooves for diode laser and fiber are illustrated to form widely tunable lasers.

Paper Details

Date Published: 21 January 2003
PDF: 7 pages
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (21 January 2003); doi: 10.1117/12.477923
Show Author Affiliations
Xu Ming Zhang, Nanyang Technological Univ. (Singapore)
J. Li, Nanyang Technological Univ. (Singapore)
Ding Yuan Tang, Nanyang Technological Univ. (Singapore)
Chao Lu, Nanyang Technological Univ. (Singapore)
Ai Qun Liu, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 4983:
MOEMS and Miniaturized Systems III
James H. Smith, Editor(s)

© SPIE. Terms of Use
Back to Top