Share Email Print
cover

Proceedings Paper

Micromachined in-plane tunable optical filter using thermo-optic effect
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

This paper presents, for the first time, a micromachined in-plane tunable optical filter (TOF) using thermo-optic effect for wavelength division multiplexed telecommunication. The TOFs are comprised of a Fabry-Perot silicon optical resonator formed between two distributed Bragg reflectors with high-reflectance based on silicon/air-gap pairs. The whole device was vertically fabricated using silicon deep reactive ion etching (DRIE). And input/output optical fibers were easily aligned along with the TOF structure on the substrate by exploiting in-plane fiber alignment. Tunability of the TOFs is experimentally achieved through thermal modulation of optical path length by heating the silicon resonator. As an input voltage increases, a notch of reflectance spectrum shifts to a longer wavelength with a tuning range of 9 nm and 3dB bandwidth of 2nm. The temperature of a silicon resonator was estimated to be about 93°C for the tuning range.

Paper Details

Date Published: 21 January 2003
PDF: 8 pages
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (21 January 2003); doi: 10.1117/12.477918
Show Author Affiliations
Sungsik Yun, Kwangju Institute of Science and Technology (South Korea)
Jong Hyun Lee, Kwangju Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 4983:
MOEMS and Miniaturized Systems III
James H. Smith, Editor(s)

© SPIE. Terms of Use
Back to Top