Share Email Print

Proceedings Paper

Applications of spin-on glass for waveguide and micro-optical systems
Author(s): Patrick J. Moyer; Ramazan Benrashid; Pascal Dupriez; Faramarz Farahi
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We have developed a material system, a fabrication process, and optical designs that allow for direct integration of patternable optical components onto microelectronics and optoelectronics platforms. The spin-on-glass is a sol-gel platform that has a low waveguide loss with the ability to incorporate a waveguide amplifier. Our material and process includes the ability to fabricate 3-D structures in a single photolithography step. In this paper, we present details of our fabrication process, general materials characteristics, and some optical designs for planar lightwave circuit platforms.

Paper Details

Date Published: 17 January 2003
PDF: 8 pages
Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003); doi: 10.1117/12.477859
Show Author Affiliations
Patrick J. Moyer, Waveguide Solutions, Inc. (United States)
Ramazan Benrashid, Waveguide Solutions, Inc. (United States)
Pascal Dupriez, Waveguide Solutions, Inc. (United States)
Faramarz Farahi, Waveguide Solutions, Inc. (United States)
Univ. of North Carolina/Charlotte (United States)

Published in SPIE Proceedings Vol. 4984:
Micromachining Technology for Micro-Optics and Nano-Optics
Eric G. Johnson, Editor(s)

© SPIE. Terms of Use
Back to Top