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Proceedings Paper

Nanofabrication of integrated diffractive optical elements
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Paper Abstract

We report on the design and fabrication of diffractive optical elements on high power broad area semiconductor lasers. Several issues related to the integrated diffractive elements fabrication by electron beam lithography and focused ion beam are discussed. We illustrate the flexibility of electron beam lithography by presenting results for beam focusing, splitting and tapering functions. An additional technique based on focused ion beam milling is presented for fabricating refractive lens elements onto the laser diode.

Paper Details

Date Published: 17 January 2003
PDF: 10 pages
Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003); doi: 10.1117/12.477837
Show Author Affiliations
Laurent Vaissie, CREOL/Univ. of Central Florida (United States)
Waleed Mohammed, CREOL/Univ. of Central Florida (United States)
Eric G. Johnson, CREOL/Univ. of Central Florida (United States)


Published in SPIE Proceedings Vol. 4984:
Micromachining Technology for Micro-Optics and Nano-Optics
Eric G. Johnson, Editor(s)

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