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Proceedings Paper

Phase scanning in ruling engine for the fabrication of subnanometer varied line-space diffraction gratings
Author(s): Lun Shi
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Paper Abstract

A novel method called phase scanning is suggested in this paper, with which varied line-space diffraction grating can be fabricated on a classically photoelectric ruling engine. An experimentally blazed varied line-space plane grating with a central groove density of 1200 g/mm was fabricated. The space increment varies from -0.332nm to +0.332nm. A test to examine the scanning phase method was also made on it.

Paper Details

Date Published: 17 January 2003
PDF: 8 pages
Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003); doi: 10.1117/12.477835
Show Author Affiliations
Lun Shi, Changchun Institute of Optics, Fine Mechanics and Physics (China)

Published in SPIE Proceedings Vol. 4984:
Micromachining Technology for Micro-Optics and Nano-Optics
Eric G. Johnson, Editor(s)

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