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Proceedings Paper

Off-axis variable focus and aberration control mirrors
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Paper Abstract

Elliptical-boundary deformable mirrors have been developed for focus control of an optical beam incident at forty-five degrees with respect to the surface normal. The mirrors are silicon nitride membranes 1.4×1 mm in size, designed to accommodate a 1 mm diameter beam. Two electrostatic actuation zones provide control over spherical aberration. Focal lengths ranging from infinity to 36 mm have been achieved, and the mirror surface figure has been characterized to quantify aberration. Residual aberrations have been observed to be less than λ/5 (peak to peak) measured at λ = 660 nm.

Paper Details

Date Published: 20 January 2003
PDF: 8 pages
Proc. SPIE 4985, MOEMS Display and Imaging Systems, (20 January 2003); doi: 10.1117/12.477815
Show Author Affiliations
Phillip A. Himmer, Montana State Univ. (United States)
David L. Dickensheets, Montana State Univ. (United States)


Published in SPIE Proceedings Vol. 4985:
MOEMS Display and Imaging Systems
Hakan Urey, Editor(s)

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