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Proceedings Paper

Progress on the subangstrom field emission scanning transmission electron microscope
Author(s): Shengyang Ruan; Oscar H. Kapp
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Paper Abstract

The construction of the mechanical and electronic components for the sextupole-corrected subangstrom resolution scanning transmission electron microscope (STEM) has been completed. They are now in the process of being tested. The required software for the control measurement diagnosis and operation of this instrument has been written. We have successfully obtained a beam from the field emission source and have achieved stable emission current.

Paper Details

Date Published: 1 March 1991
PDF: 13 pages
Proc. SPIE 1396, Applications of Optical Engineering: Proceedings of OE/Midwest '90, (1 March 1991); doi: 10.1117/12.47761
Show Author Affiliations
Shengyang Ruan, Enrico Fermi Institute/Univ. of Chicago (United States)
Oscar H. Kapp, Enrico Fermi Institute/Univ. of Chicago (United States)


Published in SPIE Proceedings Vol. 1396:
Applications of Optical Engineering: Proceedings of OE/Midwest '90
Rudolph P. Guzik; Hans E. Eppinger; Richard E. Gillespie; Mary Kathryn Dubiel; James E. Pearson, Editor(s)

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