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Proceedings Paper

Fabrication and characterization of waveguide structures on SOI
Author(s): Timo T. Aalto; Paeivi Heimala; Sanna Yliniemi; Markku Kapulainen; Matti J. Leppihalme
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Paper Abstract

A survey of the most common silicon-on-insulator (SOI) substrates and waveguide structures, as well as an evaluation of their applicability in optical telecommunication at the 1550 nm wavelength is presented. The design, fabrication and characterization of straight and bent SOI waveguides, as well as a thermo-optical SOI switch are described. The propagation loss of the realized SOI waveguides is below 0.25 dB/cm and thermo-optical switching is demonstrated at 10 kHz. The effect of cladding material on top SOI ridge waveguides on the polarization properties of straight and bent waveguides, as well as on directional couplers, is discussed. Both polarization independent and polarization maintaining waveguides are demonstrated. Finally, a basic principle of multi-step SOI waveguides is proposed. As examples of the potential in multi-step processing, efficient coupling between different rectangular, ridge and photonic crystal waveguides, ultra-small bends, waveguide mirrors, and extremely short multi-mode interference couplers are described.

Paper Details

Date Published: 3 April 2003
PDF: 12 pages
Proc. SPIE 4944, Integrated Optical Devices: Fabrication and Testing, (3 April 2003); doi: 10.1117/12.477283
Show Author Affiliations
Timo T. Aalto, VTT Ctr. for Microelectronics (Finland)
Paeivi Heimala, VTT Ctr. for Microelectronics (Finland)
Sanna Yliniemi, VTT Ctr. for Microelectronics (Finland)
Helsinki Univ. of Technology (Finland)
Markku Kapulainen, VTT Ctr. for Microelectronics (Finland)
Matti J. Leppihalme, VTT Ctr. for Microelectronics (Finland)
Helsinki Univ. of Technology (Finland)


Published in SPIE Proceedings Vol. 4944:
Integrated Optical Devices: Fabrication and Testing

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