Share Email Print

Proceedings Paper

Impact of deformation of the edges of two complementary patterns on electron-beam projection lithography mask making
Author(s): Hisatake Sano; Kenichi Morimoto; Yuuki Aritsuka; Hiroshi Fujita
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In EPL, one of the issues is how to reduce the critical dimension (CD) error observed at the boundary of two complementary patterns when being stitched together to form one smooth line. This paper is concerned about edge deformation of the two lines to reduce the CD error. Among several forms, a pair of concave- and convex-three-up-step edges was formed for 580-nm-wide lines with 75-nm-wide steps. Our choices of the shapes of deformed edges are presented based on the degree of difficulties of making fiber features on mask. The first choice is a pair of concave- and convex-one-step edges. Two EPL dat conversion systems, SX-GIGA/EPLON of Seiko Instruments Inc. and PATACON-6600 of Nippon Control System Corp., are introduced. They are found to automatically yield required stitching correction patterns. Their flexibility in stitching correction enough to cope with customers' requests makes them useful and practical.

Paper Details

Date Published: 1 August 2002
PDF: 6 pages
Proc. SPIE 4754, Photomask and Next-Generation Lithography Mask Technology IX, (1 August 2002); doi: 10.1117/12.476995
Show Author Affiliations
Hisatake Sano, Dai Nippon Printing Co., Ltd. (Japan)
Kenichi Morimoto, Dai Nippon Printing Co., Ltd. (Japan)
Yuuki Aritsuka, Dai Nippon Printing Co., Ltd. (Japan)
Hiroshi Fujita, Dai Nippon Printing Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 4754:
Photomask and Next-Generation Lithography Mask Technology IX
Hiroichi Kawahira, Editor(s)

© SPIE. Terms of Use
Back to Top