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Proceedings Paper

Model of coating and drying process for flat polymer film fabrication
Author(s): Hiroyuki Kagami; Ryuji Miyagawa; Atsushi Kawata; Daisuke Nakashima; Shinji Kobayashi; Takahiro Kitano; Kazuhiro Takeshita; Hiroshi Kubota; Tadahiro Ohmi
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Paper Details

Date Published: 1 August 2002
PDF: 8 pages
Proc. SPIE 4754, Photomask and Next-Generation Lithography Mask Technology IX, (1 August 2002); doi: 10.1117/12.476948
Show Author Affiliations
Hiroyuki Kagami, Kumamoto Technology & Industry Foundation (Japan)
Kyoto Univ. (Japan)
Ryuji Miyagawa, Kumamoto Industrial Research Institute (Japan)
Atsushi Kawata, Zeon Corp. (Japan)
Daisuke Nakashima, Kumamoto Univ. (Japan)
Shinji Kobayashi, Tokyo Electron Kyushu Ltd. (Japan)
Takahiro Kitano, Tokyo Electron Kyushu Ltd. (Japan)
Kazuhiro Takeshita, Tokyo Electron Kyushu Ltd. (Japan)
Hiroshi Kubota, Kumamoto Univ. (Japan)
Tadahiro Ohmi, Tohoku Univ. (Japan)


Published in SPIE Proceedings Vol. 4754:
Photomask and Next-Generation Lithography Mask Technology IX
Hiroichi Kawahira, Editor(s)

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