Share Email Print
cover

Proceedings Paper

NEGATIVE-CAR blanks feasibility study results for EB reticle fabrication beyond 100 nm node
Author(s): Fumiko Ota; Masahiro Hashimoto; Keishi Asakawa; Takao Higuchi; Yasunori Yokoya
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A negative-CAR for EB reticle fabrication beyond 100 nm node is needed, which is superior in performance such as resolution, sensitivity, pattern quality, CD movement by process delays (PCD, PED) and process latitudes. We started preliminary screening on negative-CARs, and more than 10 resists out of 3 suppliers were examined including some that were still under development. Then, three CARs (A-2, B-1 and C-3) was selected as candidates, and those candidates were evaluated in 'resolution and sensitivity', 'pattern quality', 'CD movement due to process delays' and 'process latitudes'. B-1 turned out to be the best choice in total performance. In addition, thinning coating thickness was investigated for resolution improvement. A negative-CAR for EB reticle fabrication beyond 100 nm node is needed, which is superior in performance such as resolution, sensitivity, pattern quality, CD movement by process delays (PCD, PED) and process latitudes. We started preliminary screening on negative-CARs, and more than 10 resists out of 3 suppliers were examined including some that were still under development. Then, three CARs (A-2, B-1 and C-3) was selected as candidates, and those candidates were evaluated in 'resolution and sensitivity', 'pattern quality', 'CD movement due to process delays' and 'process latitudes'. B-1 turned out to be the best choice in total performance. In addition, thinning coating thickness was investigated for resolution improvement.

Paper Details

Date Published: 1 August 2002
PDF: 12 pages
Proc. SPIE 4754, Photomask and Next-Generation Lithography Mask Technology IX, (1 August 2002); doi: 10.1117/12.476945
Show Author Affiliations
Fumiko Ota, HOYA Corp. (Japan)
Masahiro Hashimoto, HOYA Corp. (Japan)
Keishi Asakawa, HOYA Corp. (Japan)
Takao Higuchi, HOYA Corp. (Japan)
Yasunori Yokoya, HOYA Corp. (Japan)


Published in SPIE Proceedings Vol. 4754:
Photomask and Next-Generation Lithography Mask Technology IX
Hiroichi Kawahira, Editor(s)

© SPIE. Terms of Use
Back to Top