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Proceedings Paper

High-performance hierarchical fracturing
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Paper Abstract

We describe in more detail a mask data preparation (MDP) flow previously proposed. The focus on this paper is a performance comparison of hierarchical fracturing techniques compared to standard fracturing. Our flow uses GDSII data as input, including a GDSII-based job deck description. The output is maximally compacted, trapezoidal mask writer (MW) formatted data. Our flow takes advantage of hierarchy explicit in the GDSII file(s). This allows optimal determination of 'cover cells', which are repeatable groups of patterns within the data. The use of cover cells allows a reduction of fracturing runtime. In one case, a 21 GB MEBES file was fractured in 30 hours using the standard technique and 53 minutes using the hierarchical cover cell technique.

Paper Details

Date Published: 1 August 2002
PDF: 6 pages
Proc. SPIE 4754, Photomask and Next-Generation Lithography Mask Technology IX, (1 August 2002); doi: 10.1117/12.476933
Show Author Affiliations
Nicolas B. Cobb, Mentor Graphics Corp. (United States)
Weidong Zhang, Mentor Graphics Corp. (United States)


Published in SPIE Proceedings Vol. 4754:
Photomask and Next-Generation Lithography Mask Technology IX
Hiroichi Kawahira, Editor(s)

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