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Proceedings Paper

Distributed hierarchical processing
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Paper Abstract

In previous papers, [BACUS 2000 4186-13 and BACUS 2001 4562-20], developments in hierarchical fracturing and in distributed processing in the CATSTM tool were studied. This study investigates the advances in the CATSTM tool that combine hierarchical fracturing and distributed processing. Time-consuming processes such as PSM, OPC and de-slivering logic for shaped beam machines are addressed. The attendant hierarchical fracturing commands are reviewed and commands associated with distributed processing are introduced. Hierarchical and flat data fracture times are compared, as well as threaded fracture and distributed fracture times. The resulting benefits are tabulated.

Paper Details

Date Published: 1 August 2002
PDF: 6 pages
Proc. SPIE 4754, Photomask and Next-Generation Lithography Mask Technology IX, (1 August 2002); doi: 10.1117/12.476932
Show Author Affiliations
Paul DePesa, Transcription Enterprises, Inc. (United States)
Danny Keogan, Transcription Enterprises, Inc. (United States)


Published in SPIE Proceedings Vol. 4754:
Photomask and Next-Generation Lithography Mask Technology IX
Hiroichi Kawahira, Editor(s)

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