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Proceedings Paper

MOVPE technology in device applications for telecommunication
Author(s): Rodney H. Moss
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Paper Abstract

A new reflectance anisotropy (RA) spectrometer is presented. The numerous similarities with phase modulated ellipsometry (PME) are emphasized. The RA spectrometer takes advantage of the high frequency modulation (50 kHz) provided by a photoelastic modulator. Moreover as compared to other techniques, this RA spectrometer allows the determination of both the real and the imaginary part of the RA signal. The use of optical fibers in both optical arms allows an increase of the compactness of the spectrometer. The adaptation of RA to a MOCVD reactor is described in detail. Four detectors can be used simultaneously providing the real-time spectroscopic capability. The numerical data system of the detected signal is based on the use of a high precision analog-digital converter and a fast Fourier transform processor. Moreover, on-line relations between the data acquisition system and external analog signals and triggers are available. Thus it can be inferred that this reflectance anisotropy spectrometer appears a useful tool for high sensitivity optical measurements and in situ control processing.

Paper Details

Date Published: 1 March 1991
PDF: 12 pages
Proc. SPIE 1361, Physical Concepts of Materials for Novel Optoelectronic Device Applications I: Materials Growth and Characterization, (1 March 1991); doi: 10.1117/12.47674
Show Author Affiliations
Rodney H. Moss, British Telecom Research Labs. (United Kingdom)


Published in SPIE Proceedings Vol. 1361:
Physical Concepts of Materials for Novel Optoelectronic Device Applications I: Materials Growth and Characterization

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