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Proceedings Paper

Tapered-width microcantilever for pull-in voltage control
Author(s): Chieh-Hsiao Wang; Robert J. Weber
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Paper Abstract

Novel tapered-width micro-cantilevers are introduced to give more design parameters in design space for controlling and synthesizing their pull-in (actuation) voltages. For a given fabrication process, the pull-in voltage of a micro-cantilever is generally a function of the taper function of width along the length, its initial width, and its length. By controlling these design parameters, a specific pull-in voltage for a micro-cantilever can be obtained. Three types of taper functions, linear, parabolic, and exponential, were selected as the width taper functions of micro-cantilevers in this study. Pull-in voltage as low as 1V is achieved with a fast growing taper function for a micro-cantilever. From the simulation and measurement results it shows that a micro-cantilever with a fast growing width along the length has a smaller pull-in voltage but occupies more area and has a smaller bandwidth.

Paper Details

Date Published: 16 January 2003
PDF: 8 pages
Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); doi: 10.1117/12.476283
Show Author Affiliations
Chieh-Hsiao Wang, Iowa State Univ. (United States)
Robert J. Weber, Iowa State Univ. (United States)


Published in SPIE Proceedings Vol. 4981:
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
Siegfried W. Janson, Editor(s)

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