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Proceedings Paper

Hydrostatic actuation in MEMS
Author(s): Simon Mutzenich; Thurai Vinay; Gary Rosengarten
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Paper Abstract

Hydrostatic actuation is a novel method of actuation in Micro Electro Mechanical Systems (MEMS) and provides advantages over other actuation techniques in current use. Hydrostatic actuation utilises a contained pressurised medium to straighten a bent hollow beam, similar to the Bourdon tube used to measure pressure in the macro world. Research has commenced at RMIT University to design and fabricate a microgripper prototype to validate this work. To simplify the design of this microgripper a virtual prototype has been initiated. This paper looks at the work carried out and verification of this virtual prototype using mathematical and finite element modelling. Further work to be undertaken will also be discussed.

Paper Details

Date Published: 14 November 2002
PDF: 11 pages
Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); doi: 10.1117/12.476130
Show Author Affiliations
Simon Mutzenich, RMIT Univ. (Australia)
Thurai Vinay, RMIT Univ. (Australia)
Gary Rosengarten, RMIT Univ. (Australia)

Published in SPIE Proceedings Vol. 4935:
Smart Structures, Devices, and Systems
Erol C. Harvey; Derek Abbott; Vijay K. Varadan, Editor(s)

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