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Proceedings Paper

Laser-LIGA for Ni microcantilevers
Author(s): Hengyi Jin; Erol C. Harvey; Jason P. Hayes; Muralidhar K. Ghantasala; Yao Fu; Karlo Jolic; Matthew Solomon; Kynan Graves
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Paper Abstract

This paper presents our design and experimental results of nickel microcantilevers, which were fabricated using a laser-LIGA process, based on KrF (248 nm) excimer laser micromachining. A chrome-on-quartz mask, containing the desired mask patterns was prepared for this work. The substrate of copper (30 μm thick) clad printed circuit board (PCB) was laminated with Laminar 5038 photopolymer to be laser patterned. Following laser patterning and laser cleaning, all the samples were electroformed with nickel on top of the copper layer. To release the Ni microcantilevers, the excimer laser was employed again to remove the polymer in the localised area to facilitate Cu selective etching. Here, copper acted as the sacrificial layer as well. The Cu selective etching was carried out with ~ 20 % (wt) aqueous solution of ammonium persulfate. Because the Cu selective etching is isotropic, some undercuts happened next to the anchor area. The samples were characterised using optical microscope, confocal laser scanning microscope and SEM, and some of Ni cantilevers were tested electro-thermally. Their performance was analyzed with respect to the simulation results.

Paper Details

Date Published: 14 November 2002
PDF: 9 pages
Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); doi: 10.1117/12.476113
Show Author Affiliations
Hengyi Jin, Cooperative Research Ctr. for microTechnology (Australia)
Erol C. Harvey, Cooperative Research Ctr. for microTechnology (Australia)
Jason P. Hayes, Cooperative Research Ctr. for microTechnology (Australia)
Muralidhar K. Ghantasala, Cooperative Research Ctr. for microTechnology (Australia)
Yao Fu, Cooperative Research Ctr. for microTechnology (Australia)
Karlo Jolic, Cooperative Research Ctr. for microTechnology (Australia)
Matthew Solomon, Cooperative Research Ctr. for microTechnology (Australia)
Kynan Graves, Swinburne Univ. of Technology (Australia)

Published in SPIE Proceedings Vol. 4935:
Smart Structures, Devices, and Systems
Erol C. Harvey; Derek Abbott; Vijay K. Varadan, Editor(s)

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