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Proceedings Paper

Selective semiconductor gas sensor based on surface photovoltage
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Paper Abstract

The work function of tin oxide has been studied by the kelvin probe method as a function of the exposure to different gaseous species. Characterisation has been performed in dark and in presence of sub band and supra band gap light (Surface Photovoltage measurements). The light changes the response towards gases in particular at room temperature. The results foresee the possibility to improve semiconductor sensor selectivity by using monochromatic light at well defined frequency able to activate/deactivate surface states where species are adsorbed.

Paper Details

Date Published: 13 November 2002
PDF: 8 pages
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); doi: 10.1117/12.476101
Show Author Affiliations
Guido Faglia, INFM (Italy)
Univ. degli Studi di Brescia (Italy)
Camilla Baratto, INFM (Italy)
Univ. of Brescia (Italy)
Elisabetta Comini, INFM (Italy)
Univ. of Brescia (Italy)
Giorgio Sberveglieri, INFM (Italy)
Univ. of Brescia (Italy)

Published in SPIE Proceedings Vol. 4936:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Dinesh K. Sood; Ajay P. Malshe; Ryutaro Maeda, Editor(s)

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