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Proceedings Paper

Ti-Mo and Mo-W mixed oxides for gas sensing applications
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Paper Abstract

Molybdenum trioxide - tungsten trioxide (MoO3-WO3) and titanium oxide - molybdenum oxide (TiO2-MoO3) binary metal oxide thin films have been prepared by the sol-gel process and by PVD. The films were deposited using the spin coating technique and by sputtering onto alumina substrates with interdigital electrodes. MoO3-WO3 film morphology is composed of MoO3 needle like grains and WO3 spherical grains when annealed at 450°C. MoO3-TiO2 film morphology consists of a well-developed crystal structure for the sol-gel film and a porous morphology for the sputtered films when annealed at 800°C. The films exhibited selective gas sensing characteristics at an operating temperature of 300°C towards nitrogen dioxide (NO2). The RF and SG fabricated MoO3-TiO2 possess different gas sensing properties attributed to the fabrication and resulting morphological difference of the thin films.

Paper Details

Date Published: 13 November 2002
PDF: 8 pages
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); doi: 10.1117/12.476100
Show Author Affiliations
Elisabetta Comini, INFM (Italy)
Univ. of Brescia (Italy)
Giorgio Sberveglieri, INFM (Italy)
Univ. of Brescia (Italy)
Kosmas Galatsis, RMIT Univ. (Australia)
Wojtek Wlodarski, RMIT Univ. (Australia)


Published in SPIE Proceedings Vol. 4936:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Dinesh K. Sood; Ajay P. Malshe; Ryutaro Maeda, Editor(s)

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