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Proceedings Paper

Development of position sensors for macro- and microelectronic devices
Author(s): Alan L. Harvey; Liquian Qin; Ashraf Kadri; Ron Zmood
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Paper Abstract

This paper discusses the development of position sensors for mechatronic applications. In particular, these sensors were developed for magnetic bearings which require position sensing of the rotor relative to the stator. Magnetic beaings are open loop unstable, and therefore, require closed loop control of rotor position to centrally position the rotor relative to the circular bearing stator. Therefore, the position sensors are required to have high sensitivities and good resolution. In addition, electro magnetic interference (EMI) rejection and drift need to be taken into account in designing or selecting sensors for magnetic bearings, as often the magnetic bearing is operating in an environment of strong electro magnetic fields. This paper discusses displacement measuring sensor system types and the performance of units developed for high speed rotating systems and micro-scale units for mm scale magnetic bearings. The reasons to choose a particular type of sensor are discussed and the performance of inductive sensors in particular are presented. The discussion will also focus on properties of sensing coils and signal conditioners for macro as well as micro magnetic bearings.

Paper Details

Date Published: 13 November 2002
PDF: 6 pages
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); doi: 10.1117/12.476093
Show Author Affiliations
Alan L. Harvey, RMIT Univ. (Australia)
Liquian Qin, RMIT Univ. (Australia)
Ashraf Kadri, RMIT Univ. (Australia)
Ron Zmood, RMIT Univ. (Australia)

Published in SPIE Proceedings Vol. 4936:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Dinesh K. Sood; Ajay P. Malshe; Ryutaro Maeda, Editor(s)

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