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Proceedings Paper

LCVD-grown microcarbon rod for MEMS applications: a study on the Raman spectroscopic characterization
Author(s): Jayaraman Senthil Selvan; Sungho Jeong
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Paper Abstract

We have fabricated micro carbon rod/needle structures of size 30 to 400 μm on graphite substrate by the pyrolytic decomposition of ethylene precursor gas using argon ion laser (514.5 nm) at different laser power and chamber pressure. The micro carbon rods were characterized using Raman spectroscopy and two broad peaks centered at 1320-1345 cm-1 and 1589-1602 cm-1 were observed, which corresponds to D (disorder) and G (graphitic) bands, respectively. LCVD grown micro carbon rods consists of highly polycrystalline graphite as well as amorphous carbon phase. The microstructural features of the LCVD grown micro carbon rods are discussed in detail.

Paper Details

Date Published: 13 November 2002
PDF: 8 pages
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); doi: 10.1117/12.476091
Show Author Affiliations
Jayaraman Senthil Selvan, Kwangju Institute of Science and Technology (South Korea)
Sungho Jeong, Kwangju Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 4936:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Dinesh K. Sood; Ajay P. Malshe; Ryutaro Maeda, Editor(s)

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