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Proceedings Paper

Diffractive optical elements obtained using electron-beam writer and reactive ion etching
Author(s): Andrzej Kowalik; Zbigniew Jaroszewicz; Krzysztof Gora
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Paper Details

Date Published: 22 July 2002
PDF: 7 pages
Proc. SPIE 4887, Optical Techniques for Environmental Sensing, Workplace Safety, and Health Monitoring, (22 July 2002); doi: 10.1117/12.475983
Show Author Affiliations
Andrzej Kowalik, Institute of Electronics Materials Technology (Poland)
Zbigniew Jaroszewicz, Institute of Applied Optics (Poland)
Krzysztof Gora, Institute of Electronics Materials Technology (Poland)


Published in SPIE Proceedings Vol. 4887:
Optical Techniques for Environmental Sensing, Workplace Safety, and Health Monitoring

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