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Proceedings Paper

Evolution and integration of optimal IC design: performance and manufacturing issues
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Paper Abstract

A perspective is presented on how the semiconductor integrated circuit industry has evolved and what we can expect over the next decade or two. However, this 'forecast' is given in only the broadest sense, to make it relatively independent on innovations and discoveries that are likely to strongly shape the industry over this time period. Rather, trends are examined, as well as general 'tools' that will undoubtedly be important in advancing from our present microelectronics era to our presumable future in nanoelectronics.

Paper Details

Date Published: 12 July 2002
PDF: 11 pages
Proc. SPIE 4692, Design, Process Integration, and Characterization for Microelectronics, (12 July 2002); doi: 10.1117/12.475683
Show Author Affiliations
Daniel C. Cole, Boston Univ. (United States)
So-Yeon Baek, Boston Univ. (South Korea)
Xima Zhang, Boston Univ. (United States)

Published in SPIE Proceedings Vol. 4692:
Design, Process Integration, and Characterization for Microelectronics
Alexander Starikov; Kenneth W. Tobin; Alexander Starikov, Editor(s)

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