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Proceedings Paper

Model-based WYSIWYG: dimensional metrology infrastructure for design and integration
Author(s): Alexander Starikov
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Paper Abstract

The purpose of this paper is to name and discuss some of the most basic issues in today's optical microlithography and to promote consensuses building, helping with the emergence of a superior model-based WYSIWYG patterning paradigm.

Paper Details

Date Published: 12 July 2002
PDF: 16 pages
Proc. SPIE 4692, Design, Process Integration, and Characterization for Microelectronics, (12 July 2002); doi: 10.1117/12.475668
Show Author Affiliations
Alexander Starikov, Intel Corp. (United States)

Published in SPIE Proceedings Vol. 4692:
Design, Process Integration, and Characterization for Microelectronics
Alexander Starikov; Alexander Starikov; Kenneth W. Tobin, Editor(s)

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