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Proceedings Paper

Isolating causes of yield excursions with decision tress and commonality
Author(s): Peter Waksman
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Paper Abstract

The use of Decision Trees to analyze data is discussed as an approach to solving problems of Yield excursions in semiconductor manufacturing. The relation to equipment commonality is discussed along with some of the pitfalls of incautious use of general probability estimates. The paper introduces a Mixing Diagram to help visualize commonality issues, it introduces work around methods for resolving ambiguities in the commonality, it reviews Decision Trees algorithms, and it ends with a discussion of current limitations of the method along with recommendations for future research.

Paper Details

Date Published: 12 July 2002
PDF: 8 pages
Proc. SPIE 4692, Design, Process Integration, and Characterization for Microelectronics, (12 July 2002); doi: 10.1117/12.475647
Show Author Affiliations
Peter Waksman, Defect and Yield Management, Inc. (United States)


Published in SPIE Proceedings Vol. 4692:
Design, Process Integration, and Characterization for Microelectronics
Alexander Starikov; Kenneth W. Tobin; Alexander Starikov, Editor(s)

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