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Proceedings Paper

Integration of silicon microlenses to light sources for datacom and telecom applications
Author(s): Hironori Sasaki; Masahiro Uekawa; Kyoko Kotani; Daisuke Shimura; Yoshinori Maeno; Hiroshi Wada; Takeshi Takamori
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Paper Abstract

Passive alignment between the light source and coupling lenses may be one of the crucial and yet challenging technical fields to produce low-cost optical modules for telecom and datacom applications. In our presentation, we report the current status of our integration technologies of both surface and edge emitting type lasers with coupling lenses. We propose surfacemountable silicon microlens whose diameter is identical to a conventional optical fiber. The microlens can be passively aligned in the silicon v-groove to realize beam coupling between an edge emitting laser diode and an optical fiber. Coupling efficiency of -3.2dB between distributed feed-back laser diode and a single-mode fiber was experimentally confirmed. Precise rod shape is fabricated by D-RIE technology. We also report monolithic integration of the silicon substrate and a surface-emitting light source accomplished by direct bonding technology. The corresponding collimating lens is fabricated on the back-surface of the same silicon substrate. Passive alignment between the light source and the corresponding lenses are ensured by using a double-view mask aligner with sub-micron accuracy.

Paper Details

Date Published: 11 July 2002
PDF: 9 pages
Proc. SPIE 4870, Active and Passive Optical Components for WDM Communications II, (11 July 2002); doi: 10.1117/12.475563
Show Author Affiliations
Hironori Sasaki, Oki Electric Industry Co., Ltd. (Japan)
Masahiro Uekawa, Oki Electric Industry Co., Ltd. (Japan)
Kyoko Kotani, Oki Electric Industry Co., Ltd. (Japan)
Daisuke Shimura, Oki Electric Industry Co., Ltd. (Japan)
Yoshinori Maeno, Oki Electric Industry Co., Ltd. (Japan)
Hiroshi Wada, Oki Electric Industry Co., Ltd. (Japan)
Takeshi Takamori, Oki Electric Industry Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 4870:
Active and Passive Optical Components for WDM Communications II
Achyut Kumar Dutta; Abdul Ahad Sami Awwal; Niloy K. Dutta; Katsunari Okamoto, Editor(s)

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