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Proceedings Paper

Finite element analysis on reduction of the cross talk in ultrasonic transducers
Author(s): Yongrae R. Roh; Youngshin Kim; Kookjin Kang
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Paper Abstract

In an ultrasonic transducer, the cross talk between array elements is an important performance degrading factor, and there is strong need to identify the sources of the problem and to find the means to reduce its level. This paper considers two most representative ultrasonic transducers, capacitive micromachined ultrasonic transducer (cMUT) and piezoelectric transducer. Both are linear array immersion transducers. Two-dimensional finite element models of the transducers are constructed using the commercial code ANSYS. We analyze the origin and level of the cross talk between array elements, with evidence of coupling through certain waves such as the Stoneley wave propagating at the transducer-water interface and the Lamb wave propagating in the substrate or the impedance matching layer. For reduction of the cross talk level, the effects of various structural schemes are investigated. They are the change of wafer thickness, the installation of etched trenches of various dimension and sound absorbing materials inside, and installation of polymer walls between array elements for a cMUT as well as the change of the dimension and material of kerfs for a piezoelectric transducer. Results for the two transducers are discussed to describe the general method to reduce the cross talk level in ultrasonic transducers.

Paper Details

Date Published: 10 July 2002
PDF: 8 pages
Proc. SPIE 4693, Smart Structures and Materials 2002: Modeling, Signal Processing, and Control, (10 July 2002); doi: 10.1117/12.475217
Show Author Affiliations
Yongrae R. Roh, Kyungpook National Univ. (South Korea)
Youngshin Kim, Kyungpook National Univ. (South Korea)
Kookjin Kang, Kyungpook National Univ. (South Korea)

Published in SPIE Proceedings Vol. 4693:
Smart Structures and Materials 2002: Modeling, Signal Processing, and Control
Vittal S. Rao, Editor(s)

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