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Proceedings Paper

Carbon and ceramic microcoils for MEMS by microwave CVD
Author(s): Jining Xie; Chiauling Ong; Vijay K. Varadan
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Paper Abstract

In this paper, synthesis of carbon and ceramic microcoils by microwave chemical vapor deposition method is presented. Carbon microcoils were synthesized over nickel catalyst using acetylene as carbon source by microwave technique. Titanium carbide microcoils were gained by direct titanization to carbon microcoils .A comparison is given between conventional thermal filament CVD and microwave CVD methods. Particular attention is given to the potential applications of carbon and ceramic microcoils for MEMS.

Paper Details

Date Published: 11 July 2002
PDF: 9 pages
Proc. SPIE 4700, Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology, (11 July 2002); doi: 10.1117/12.475031
Show Author Affiliations
Jining Xie, The Pennsylvania State Univ. (United States)
Chiauling Ong, DSO National Lab (Singapore)
Vijay K. Varadan, The Pennsylvania State Univ. (United States)


Published in SPIE Proceedings Vol. 4700:
Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology
Vijay K. Varadan, Editor(s)

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