Share Email Print
cover

Proceedings Paper

Development of a MEMS-rate sensor with PZT actuation and sensing
Author(s): Christopher M. Royle; Colin H.J. Fox
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

This paper relates to the development of a novel rate sensor for a wide range of potential applications in the automotive field, amongst others. The sensor is based on the dynamic behavior of an active, vibrating silicon structure that uses thin-film piezoelectric material for actuation and sensing functions, and can be manufactured using silicon micro-machining techniques. The use of piezo-electric material for drive and pickoff offers potentially significant advantages over electrostatic/capacitive means in terms of achievable actuation forces and simplicity of structural design. This paper gives an overview of the design and analysis of a prototype sensor. The design concept is described and a low-order mathematical model, incorporating the inertial behavior of the structure and the interaction between the silicon structure and the piezo-drives and pickoffs is presented. This model allows the basic sensitivity of the sensor to be quantified. The design of a prototype sensor is then described. Some preliminary test results are presented, illustrating the feasibility of the concept.

Paper Details

Date Published: 11 July 2002
PDF: 11 pages
Proc. SPIE 4700, Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology, (11 July 2002); doi: 10.1117/12.475018
Show Author Affiliations
Christopher M. Royle, Univ. of Nottingham (United Kingdom)
Colin H.J. Fox, Univ. of Nottingham (United Kingdom)


Published in SPIE Proceedings Vol. 4700:
Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology
Vijay K. Varadan, Editor(s)

© SPIE. Terms of Use
Back to Top