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Proceedings Paper

Pressurized shape-memory micropumps
Author(s): Yi-Chung Shu
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Paper Abstract

We propose a multiscale framework to study the behavior of pressurized shape-memory thin films. These alloy films are typically heterogeneous and contain three length scales including film thickness, grain size and microstructure scale. We show that the effective behavior of shape-memory film exhibits strong size effect due to the interaction among these dimensional and material length scales. In addition, we apply the thin-film theory to predict maximum recoverable deflection for various shape-memory diaphragms with different textures. We find that recoverable deflection is not sensitive to common film textures in Ti-Ni films while it is sensitive in Cu-based shape-memory films. It turns out that Cu-based films may have better behavior than sputtered Ti-Ni films in view of large recoverable deflection. We conclude with comparison with experiment.

Paper Details

Date Published: 11 July 2002
PDF: 10 pages
Proc. SPIE 4699, Smart Structures and Materials 2002: Active Materials: Behavior and Mechanics, (11 July 2002); doi: 10.1117/12.474983
Show Author Affiliations
Yi-Chung Shu, National Taiwan Univ. (Taiwan)

Published in SPIE Proceedings Vol. 4699:
Smart Structures and Materials 2002: Active Materials: Behavior and Mechanics
Christopher S. Lynch, Editor(s)

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