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Proceedings Paper

Precipitation of HNbO3 at the Ti:LiNbO3 surface
Author(s): Ivan Kalabin; Tatiana I. Grigorieva; Lev D. Pokrovsky; Victor V. Atuchin
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Paper Abstract

The conditions of HNbO3 precipitation on the lithium niobate single-crystal and titanium diffused lithium niobate were studied. It has been shown, that the maximum of HNbO3 precipitation corresponds to the highest humidity of atmosphere at the annealing temperatures of 800-850°C for 5-10h. Moreover, the application of humid atmosphere during the annealing of LN at 600-850°C does not ensure in full measure the lack of LiNb3O8 precipitation.

Paper Details

Date Published: 3 April 2003
PDF: 6 pages
Proc. SPIE 4944, Integrated Optical Devices: Fabrication and Testing, (3 April 2003); doi: 10.1117/12.474863
Show Author Affiliations
Ivan Kalabin, Institute of Semiconductor Physics (Russia)
Tatiana I. Grigorieva, Institute of Semiconductor Physics (Russia)
Lev D. Pokrovsky, Institute of Semiconductor Physics (Russia)
Victor V. Atuchin, Institute of Semiconductor Physics (Russia)


Published in SPIE Proceedings Vol. 4944:
Integrated Optical Devices: Fabrication and Testing

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