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Proceedings Paper

Characterization of BaTiO3 thin films fabricated by sol gel method
Author(s): Daniel Hernandez Cruz; Roger A. Lessard
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Paper Abstract

Barium titanate sol was prepared using barium 2-ethyl-hexanoate and titanium isopropoxide. The sol was then spin coated on Si (100) and MgO (100) substrates and annealed at different temperatures to give polycrystalline, transparent, and crack free films. The surface morphology and structural properties of the film were studied using X-ray diffraction (XRD), Rutherford Backscattering Spectroscopy (RBS) and, Scanning Electron Microscopy (SEM).

Paper Details

Date Published: 17 February 2003
PDF: 7 pages
Proc. SPIE 4833, Applications of Photonic Technology 5, (17 February 2003); doi: 10.1117/12.474833
Show Author Affiliations
Daniel Hernandez Cruz, Laval Univ. (Canada)
Roger A. Lessard, Univ. Laval (Canada)


Published in SPIE Proceedings Vol. 4833:
Applications of Photonic Technology 5

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