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Proceedings Paper

Aberration sensitivity control for the isolation layer in low-k1 DRAM process
Author(s): Byeong-Ho Cho; Donggyu Yim; Chan-Ha Park; Seung-Hyuk Lee; Hyun-Jo Yang; Jae-Hak Choi; Yong-Chul Shin; Choi-Dong Kim; Jae-Sung Choi; Khil-Ohk Kang; Sang-Wook Kim; Tae-Hwa Yu; Jong-Kyun Hong; Jung-Chan Kim; Min-Seob Han; Ho-Young Heo; Young-Dae Kim; Dong-Duk Lee; Gyu-Han Yoon; Jan B.P. van Schoot; Thomas Theeuwes; Young-Hong Min
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Paper Abstract

One of the crucial factors to take mostly into account the development and production of 130 nm node in low k1 DRAM process is the lens aberration sensitivity control of optical lithographic tools. To meet the required specification these impact of lens aberration resulting from reducing process window caused by pattern deformation, CD uniformity, CD asymmetry, and pattern shift etc. should be understood and considered. In this study, we mainly focused on the aberration sensitivity control for the DRAM isolation layer that is very sensitive to odd components such as coma and three-foil etc. There are a few methods to do this, but the application of extreme sigma setting that is the powerful manner to improvement of asymmetric pattern and layout rotation were examined. It was confirmed that the simulated image and real patterning results for left-right CD difference came from aberrated lens are well matched. In addition, why is the extreme sigma setting more effective than standard settings was investigated with analysis of diffraction patterns on pupil filling of projection lens optics combined with Zernike coefficients phase map.

Paper Details

Date Published: 30 July 2002
PDF: 9 pages
Proc. SPIE 4691, Optical Microlithography XV, (30 July 2002); doi: 10.1117/12.474633
Show Author Affiliations
Byeong-Ho Cho, Hynix Semiconductor Inc. (South Korea)
Donggyu Yim, Hynix Semiconductor Inc. (South Korea)
Chan-Ha Park, Hynix Semiconductor Inc. (South Korea)
Seung-Hyuk Lee, Hynix Semiconductor Inc. (South Korea)
Hyun-Jo Yang, Hynix Semiconductor Inc. (South Korea)
Jae-Hak Choi, Hynix Semiconductor Inc. (South Korea)
Yong-Chul Shin, Hynix Semiconductor Inc. (South Korea)
Choi-Dong Kim, Hynix Semiconductor Inc. (South Korea)
Jae-Sung Choi, Hynix Semiconductor Inc. (South Korea)
Khil-Ohk Kang, Hynix Semiconductor Inc. (South Korea)
Sang-Wook Kim, Hynix Semiconductor Inc. (South Korea)
Tae-Hwa Yu, Hynix Semiconductor Inc. (South Korea)
Jong-Kyun Hong, Hynix Semiconductor Inc. (South Korea)
Jung-Chan Kim, Hynix Semiconductor Inc. (South Korea)
Min-Seob Han, Hynix Semiconductor Inc. (South Korea)
Ho-Young Heo, Hynix Semiconductor Inc. (South Korea)
Young-Dae Kim, Hynix Semiconductor Inc. (South Korea)
Dong-Duk Lee, Hynix Semiconductor Inc. (South Korea)
Gyu-Han Yoon, Hynix Semiconductor Inc. (South Korea)
Jan B.P. van Schoot, ASML (Netherlands)
Thomas Theeuwes, ASML (South Korea)
Young-Hong Min, ASML (South Korea)


Published in SPIE Proceedings Vol. 4691:
Optical Microlithography XV
Anthony Yen, Editor(s)

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