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Proceedings Paper

Model-assisted double dipole decomposition
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Paper Details

Date Published: 30 July 2002
PDF: 11 pages
Proc. SPIE 4691, Optical Microlithography XV, (30 July 2002); doi: 10.1117/12.474589
Show Author Affiliations
Andres Torres, Mentor Graphics Corp. (United States)
Franklin M. Schellenberg, Mentor Graphics Corp. (United States)
Olivier Toublan, Mentor Graphics Corp. (United States)


Published in SPIE Proceedings Vol. 4691:
Optical Microlithography XV
Anthony Yen, Editor(s)

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