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Proceedings Paper

Long-term laser durability testing of optical coatings and thin films for 157-nm lithography
Author(s): Vladimir Liberman; Mordechai Rothschild; Stephen T. Palmacci; N. N. Efremow; Jan H. C. Sedlacek; A. Grenville
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Paper Details

Date Published: 30 July 2002
PDF: 8 pages
Proc. SPIE 4691, Optical Microlithography XV, (30 July 2002); doi: 10.1117/12.474552
Show Author Affiliations
Vladimir Liberman, MIT Lincoln Lab. (United States)
Mordechai Rothschild, MIT Lincoln Lab. (United States)
Stephen T. Palmacci, MIT Lincoln Lab. (United States)
N. N. Efremow, MIT Lincoln Lab. (United States)
Jan H. C. Sedlacek, MIT Lincoln Lab. (United States)
A. Grenville, Intel Corp. (United States)
International SEMATECH (United States)

Published in SPIE Proceedings Vol. 4691:
Optical Microlithography XV
Anthony Yen, Editor(s)

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