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Proceedings Paper

Continuous surface-relief micro-optical elements and their replication in polymer and other materials
Author(s): Patrice A. Topart; Nathalie Bacon; Hubert Jerominek; Daniel Asselin; R. Beaulieu; Sebastien LeClair
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Paper Abstract

This paper describes the enabling technologies developed at INO to generate continuous surface-relief profile diffractive and refractive optical elements in photoresist. Grey-scale mask photolithography based on high-energy beam sensitive glass and laser direct writing have been used to fabricate aspherical refractive and diffractive microlenses respectively. Properties of refractive microlenses are compared to those fabricated by the standard reflow technique. The replication of such elements by injection molding and UV-embossing in acrylic and custom hybrid sol-gel glasses respectively is described. Fidelity of replication in the various processing steps is given. Optical performance of aspherical microlenses with f-numbers between 0.69 and 7 as well as thermo-mechanical properties of organic/inorganic materials are given.

Paper Details

Date Published: 17 February 2003
PDF: 11 pages
Proc. SPIE 4833, Applications of Photonic Technology 5, (17 February 2003); doi: 10.1117/12.474410
Show Author Affiliations
Patrice A. Topart, Institut National d'Optique (Canada)
Nathalie Bacon, Institut National d'Optique (Canada)
Hubert Jerominek, Institut National d'Optique (Canada)
Daniel Asselin, Institut National d'Optique (Canada)
R. Beaulieu, Institut National d'Optique (Canada)
Sebastien LeClair, Institut National d'Optique (Canada)


Published in SPIE Proceedings Vol. 4833:
Applications of Photonic Technology 5

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