Share Email Print
cover

Proceedings Paper

Sensitivity dependence with respect to diaphragm dimensions in a glass-based integrated optic pressure sensor
Author(s): Yoshihiko Iwase; Yumi Okamoto; Masashi Ohkawa; Seishi Sekine; Takashi Sato
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In this paper, the relationship between sensitivity and diaphragm dimensions in a glass-based integrated optic pressure sensor is described. The sensor has a rectangular diaphragm as a pressure-sensitive structure and a straight sensing waveguide across the diaphragm. The sensor operation is based on the phenonemon that a phase difference between two orthogonal guilded modes is induced by the elasto-optic effect in the presence of applied pressure. The sensitivity of the sensor is theoretically known to be dependent on the thickness and side length of the diaphragm. Such dependencies are worth investigating to obtain helpful design rules for miniaturization of the sensor, but have not been examined experimentally in detail. In this study, to examine the relationship between sensitivity and thickness, two sensors were fabricated with 10 mm x 10 mm x 0.3 mm (sensor #1) and 10 mm x 10 mm x 0.22 mm (sensor #2) diaphragms. The sensitivity of sensor #2 was larger than that of sensor #1 by a factor of 1.72, which closely agreed with the theoretical factor of 1.86. Moreover, to determine the relationship between sensitivity and side length, two more sensors, besides sensor #2, with 7mm-square (sensor #3) and 14mm-square (sensor #4) diaphragms were fabricated with a diaphragm thickness of 0.22 mm. The measured sensitivities agree approximately with the theoretical ones although there was a slight difference in sensor #4.

Paper Details

Date Published: 19 June 2003
PDF: 8 pages
Proc. SPIE 4987, Integrated Optics: Devices, Materials, and Technologies VII, (19 June 2003); doi: 10.1117/12.474348
Show Author Affiliations
Yoshihiko Iwase, Niigata Univ. (Japan)
Yumi Okamoto, Niigata Univ. (Japan)
Masashi Ohkawa, Niigata Univ. (Japan)
Seishi Sekine, Niigata Univ. (Japan)
Takashi Sato, Niigata Univ. (Japan)


Published in SPIE Proceedings Vol. 4987:
Integrated Optics: Devices, Materials, and Technologies VII
Yakov S. Sidorin; Ari Tervonen, Editor(s)

© SPIE. Terms of Use
Back to Top