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Proceedings Paper

Low-voltage high-torque two-degree-of-freedom scanning micromirror for ECOM applications
Author(s): Tze-Wei Yeow; K. Y. Lim; B Wilson; Andrew A. Goldenberg
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Paper Abstract

This paper presents a novel 2D-scanning micro-mirror used in ECOM for in vivo and in situ tissue imaging using MEMS technology. The 2D scanner accomplishes Raster Scanning with just one mirror. The size of the mirror is 1mm by 1mm and is rotated about two axes giving it two degree of freedom. The scanning mirror is actuated electrostatically. The inherent disadvantages of electrostatic actuation such as high crosstalk between electrodes, and large nonlinearity in voltage to angle relationship are systematically addressed. In the context of biomedical applications, it is desirable to minimize the driving voltage requirements of the electrostatic actuators while maintaining the same scan angle. The optical scanner described in this paper is capable of generating large scan angles with low driving voltages, thus making it highly suitable for biomedical imaging.

Paper Details

Date Published: 17 February 2003
PDF: 10 pages
Proc. SPIE 4833, Applications of Photonic Technology 5, (17 February 2003); doi: 10.1117/12.474303
Show Author Affiliations
Tze-Wei Yeow, University of Toronto (Canada)
K. Y. Lim, University of Toronto (Canada)
B Wilson, University of Toronto (Canada)
Andrew A. Goldenberg, Univ. of Toronto (Canada)


Published in SPIE Proceedings Vol. 4833:
Applications of Photonic Technology 5

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