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Proceedings Paper

Synergic effect of acetal-based resin by blending with poly[4-hydroxy styrene-co-tert-butyl acrylate-co-4-(3-cyano-1,5-di-tert-butyl carbonyl pentyl styrene (P(HS-TBA-CBPS)) on the profiles of 248 n
Author(s): Hyun-Jin Kim; Yoon-Sik Chung; Dong Hwal Lee; Sook Hee Cho; Kwang Hwyi Im; Yun-Gill Yim; Deog-Bae Kim; Jae-Hyun Kim
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Paper Abstract

We prepared ter-polymer of hydroxystyrene, tert-butyl acrylate and 4-(3-cyano-1,5-di-tert-butyl carbonyl pentyl styrene) (P(HS-TBA-CBPS)) and discussed a characteristic of prepared polymer. As TBA, newly introduced monomer increases, contrast of resist is improved. And the prepared polymer was blended with poly(4-hydroxystyrene-co-4-(1-ethylethoxystyrene)) (EE-PHS). The synergic effect on a resist performance in KrF lithography by the combination of high and low activation energy system was shown. A resist using blending polymer was shown a good performance on resolution and LER(Line Edge Roughness) than resist using polymer separately. Based on the results, it was found that high performance KrF resist could be obtained by optimization of polymer blending.

Paper Details

Date Published: 24 July 2002
PDF: 9 pages
Proc. SPIE 4690, Advances in Resist Technology and Processing XIX, (24 July 2002); doi: 10.1117/12.474265
Show Author Affiliations
Hyun-Jin Kim, DongJin Semichem Co., Ltd. (South Korea)
Yoon-Sik Chung, DongJin Semichem Co., Ltd. (South Korea)
Dong Hwal Lee, DongJin Semichem Co., Ltd. (South Korea)
Sook Hee Cho, DongJin Semichem Co., Ltd. (South Korea)
Kwang Hwyi Im, DongJin Semichem Co., Ltd. (South Korea)
Yun-Gill Yim, DongJin Semichem Co., Ltd. (South Korea)
Deog-Bae Kim, DongJin Semichem Co., Ltd. (South Korea)
Jae-Hyun Kim, DongJin Semichem Co., Ltd. (South Korea)


Published in SPIE Proceedings Vol. 4690:
Advances in Resist Technology and Processing XIX
Theodore H. Fedynyshyn, Editor(s)

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