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Proceedings Paper

Quantitative description of phenolic polymer dissolution using the concept of gel layer: II. base cation size effect
Author(s): Joon Yeon Cho; Se-Jin Choi
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Paper Abstract

The phenolic polymer is assumed to be transferred, via intermediate gel state, from the resin to the developer solution. A mechanism for the development of phenolic polymer is proposed to derive a development rate equation considering gel layer formation. In the previous paper, new model using the concept of gel layer made it possible to provide a theoretical interpretation for experimental data of dissolution behavior, for example the dependence of the dissolution rate of phenolic polymer on the aqueous base concentration and molecular weight of resin. Following the previous paper, the dependence of the dissolution rate on the size of the base cation can be explained by taking the diffusion of base through the gel layer into account.

Paper Details

Date Published: 24 July 2002
PDF: 9 pages
Proc. SPIE 4690, Advances in Resist Technology and Processing XIX, (24 July 2002); doi: 10.1117/12.474164
Show Author Affiliations
Joon Yeon Cho, DongJin Semichem Co., Ltd. (South Korea)
Se-Jin Choi, DongJin Semichem Co., Ltd. (South Korea)


Published in SPIE Proceedings Vol. 4690:
Advances in Resist Technology and Processing XIX
Theodore H. Fedynyshyn, Editor(s)

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