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Proceedings Paper

New advancements in focused ion-beam repair of alternating phase-shift masks
Author(s): Joshua Lessing; Rey A. Brannen; Tod Robinson; Troy B. Morrison; Theresa Holtermann
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Proc. SPIE 4889, 22nd Annual BACUS Symposium on Photomask Technology, ; doi: 10.1117/12.474063
Show Author Affiliations
Joshua Lessing, FEI Co. (United States)
Rey A. Brannen, FEI Co. (United States)
Tod Robinson, FEI Co. (United States)
Troy B. Morrison, FEI Co. (United States)
Theresa Holtermann, FEI Co. (United States)


Published in SPIE Proceedings Vol. 4889:
22nd Annual BACUS Symposium on Photomask Technology
Brian J. Grenon; Kurt R. Kimmel, Editor(s)

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