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Proceedings Paper

Fine structure measurement in the SEM cross section of LSI using the Canny edge detector
Author(s): Yoshihiro Midoh; Katsuyoshi Miura; Koji Nakamae; Hiromu Fujioka
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Paper Abstract

In this paper, we describe a method to optimize parameters of the Canny edge detector, when it is applied to critical dimension (CD) measurements in the cross-sectional scanning electron microscope (SEM) image of the LSI. The Canny is a typical boundary extraction method that convolves the input image with the Laplacian of the Gaussian mask to suppress noise and identify the zero crossing points. The parameters to be optimized are a standard deviation of the Gaussian mask and a threshold value that is used when the zero crossing points are identified. The statistical characteristics of the noise in the SEM image are well known: the major gredient of the SEM image is shot noise. Therefore shot noise is assumed in this method. We apply the method to a model image where shot noise is added and derive the condition where the Canny is effective to measure the fine structure in the image accurately.

Paper Details

Date Published: 22 May 2003
PDF: 10 pages
Proc. SPIE 5011, Machine Vision Applications in Industrial Inspection XI, (22 May 2003); doi: 10.1117/12.474039
Show Author Affiliations
Yoshihiro Midoh, Osaka Univ. (Japan)
Katsuyoshi Miura, Osaka Univ. (Japan)
Koji Nakamae, Osaka Univ. (Japan)
Hiromu Fujioka, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 5011:
Machine Vision Applications in Industrial Inspection XI
Martin A. Hunt; Jeffery R. Price, Editor(s)

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